![]() ![]() Want to advertise to this community? See Provider of MEMS and Nanotechnology design and fabrication services. Hosted by the MEMS and Nanotechnology Exchange, the country's leading It starts flickering when you mix O2 with SF6 and/or CHF3. Pure O2 plasma, even at 30mTorr, does not flicker atĪll. SF6/O2/CHF3 gas chemistry at 30mTorr, 200W. Subject: Reasons for Plasma Flickering in Oxford Plasmalabĭoes any one know what could be the reasons for Plasma Flickering in I haven't seen that with our plasmalab 80, but then we don't do any We have a similar problem in our plasmalab systemġ00. Of the chamber and it needs to be cleaned between runs, maybe with a dryĬlean (O2/CF4 is usually pretty good), or it might need a manual scrub My guess is that some of your etch products are depositing on the walls
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